Meaning
Irreversible deviation in the regular arrangement of atoms within a crystalline solid that does not follow a proportional relationship with the applied force. This non-linear lattice dislocation occurs when the internal stress exceeds the elastic limit of the material, causing atomic planes to slide over one another. In semiconductor manufacturing, these defects can alter the electrical properties of the silicon and lead to the failure of the integrated circuit.
Strain Energy
Energy stored within the crystal structure increases as the lattice is deformed by external pressure or thermal gradients. A non-linear lattice dislocation is a way for the material to release this energy through a permanent change in shape. Once the dislocation is formed, the atomic bonds are restructured into a new, stable configuration that cannot be undone by removing the load.
This process is often accompanied by a localized increase in heat as the energy is dissipated.
Electrical Impact
Path of electrons through the crystal is disrupted by the presence of a structural break in the lattice. A non-linear lattice dislocation creates energy states within the bandgap of the semiconductor that can trap carriers or facilitate leakage currents. This degradation reduces the efficiency of transistors and can cause a total loss of functionality in sensitive areas of the chip.
Monitoring for these defects during the wafer inspection process is necessary to maintain high production yields.
Failure Progression
Small defects can act as nucleation points for larger cracks or more extensive structural failures over time. The presence of a non-linear lattice dislocation weakens the local area and makes it more susceptible to further damage from vibration or thermal expansion. As the device undergoes repeated thermal cycles during operation, the dislocation may grow or interact with other defects.
This gradual weakening eventually leads to a mechanical or electrical failure that ends the life of the product.